Papers

With Tag: Wet Etching

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Optical Investigations of the Sidewall Recombination in Wet Etched InGaAs/InP-Wires

Japanese Journal of Applied Physics | 1993 | 10.1143/JJAP.32.L173

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Mask-Under-Etch Experiments of Si{110} in TMAH

L M Landsberger, Mojtaba Kahrizi, A Pandy
1999 | 10.1109/CCECE.1999.804959

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An experimental study of TiN gate FinFET SRAM with (111)-oriented sidewall channels

Eiichi Suzuki, T Matsukawa, K Sakamoto, Yuki Ishikawa, K Ishii, Hiroyuki Yamauchi, Meishoku Masahara, Y X Liu, S Ouchi, Kazuhiko Endo, J Tsukada, T Hayashida, Atsushi Ogura
2008 | 10.1109/SNW.2008.5418473

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Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysilicon

IEEE\/ASME Journal of Microelectromechanical Systems | 1999 | 10.1109/84.788626

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Novel 0.9 THz integrated horn antenna based on MEMS technology

Yong Liu, Xin Lv, Yong Yuan
2009 | 10.1117/12.835732

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Innovative nitride passivation of 0.1 /spl mu/m InGaAs/InAlAs/InP HEMTs using high-density inductively coupled plasma CVD (HD-ICP-CVD)

R Lai, Y C Chou, M Barsky, A K Oki, R Grundbacher, Y Ra, G P Li, H K Kim, P Nam, D C Streit
2002 | 10.1109/ICIPRM.2002.1014392

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Fundamental Properties of Intentionally Neutralized Argon Fast ATM Beam Etching for III-V Semiconductors

Mamoru Naoi, Norihiko Matsuzaka, Eigo Matsuura, Tsugunori Okumura, Michihiko Suhara
2007 | 10.1109/ICIPRM.2007.381138

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(110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter

Hwa Il Seo, Yu Min Jung, Yeong Cheul Kim
Key Engineering Materials | 2006 | 10.4028/www.scientific.net/KEM.321-323.1704

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Fabrication approach for lateral InGaAs tunnel transistors

2009 | 10.1109/ISDRS.2009.5378160

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Use of a new anisotropic etching simulator on quartz crystal

J L F Wang, Hiroyuki Oigawa, Minhua Zhao, Takanori Ueda, Jin Chen Ji
2011 | 10.1109/TRANSDUCERS.2011.5969578

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Optimizing mask materials and laser pattern transfer processing for cheap MCM-L fast prototyping and special sensor applications

Journal of PeriAnesthesia Nursing | 1998 | 10.1109/ICMCM.1998.670824

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Low damage reactive ion etching process for fabrication of ridge waveguide lasers

B C Qiu, A C Bryce, J H Marsh, B S Ooi, S E Hicks, R M De La Rue, C D W Wilkinson
1997 | 10.1109/ICIPRM.1997.600232

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Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems

Philippe Gaucher
1996 | 10.1117/12.237025

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2.0-μm single-mode operation of InGaAs-InGaAsP distributed-feedback buried-heterostructure quantum-well lasers

IEEE Photonics Technology Letters | 1997 | 10.1109/68.559378

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Nondestructive thermal wave detection of internal micro-defects using scanning electron-induced acoustic microscope

Akio Koyama, Yasuhiko Shibutani, Junichi Fujita
2009 | 10.1117/12.851429

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