Papers

With Tag: Lithography

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Tactile sensitivity of the tongue on photolithographically fabricated patterns

Hui Tang, David J Beebe
1999 | 10.1109/IEMBS.1999.802711

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Daily scheduling for R&D semiconductor fabrication

Dayin Liao, Shichung Chang, Chengchung Chien, Shouren Yen
1993 | 10.1109/ROBOT.1993.291868

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Reticle Exposure Plans for Multi-Project Wafers

D Hsu, Rungbin Lin, Minghsine Kuo, Mengchiou Wu
2007 | 10.1109/DDECS.2007.4295308

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A Hybrid Nano-Imprinting Lithography Based on Infrared Pulsed Laser Heating

Yungchun Lee, Chunhung Chen, Chuanpu Liu
2006 | 10.1109/NEMS.2006.334591

none

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A large uniform monolayer area obtained by droplet evaporation in microwells

Fangang Tseng, Yuying Lin, Dajeng Yao
2010 | 10.1109/NEMS.2010.5592189

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Infrared-assisted and roller-based direct metal contact transfer technology for flexible polarizer

Yungchun Lee, Tehui Yu, Feibin Hsiao, Chunhung Chen
2010 | 10.1109/NEMS.2010.5592114

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Intelligent control of critical dimension in photolithography process

M T Musavi, S U Khan, Habtom W Ressom
2001 | 10.1109/IJCNN.2001.939068

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Electrical characteristics of silicon nanowire transistor fabricated by AFM lithography

Sabar D Hutagalung, Kam C Lew
2010 | 10.1109/SMELEC.2010.5549507

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Stem-cell culture on patterned bio-functional surfaces

Journal of Biomaterials Science-polymer Edition | 2012 | 10.1163/156856208786440514

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Embedded software verification: challenges and solutions

Shuvendu K Lahiri, Daniel Kroening, Malay K Ganai, Chao Wang
2008 | 10.1109/ICCAD.2008.4681536

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Fixed origin corner square inspection layout regularity metric

Marc Pons, Marc Morgan, Christian Piguet
2012 | 10.1109/DATE.2012.6176581

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Simple fabrication process for thickness-tunable GMR biosensor

Tsunghsun Yang, Jiannhwa Lue, Tingjou Ding
2011 | 10.1109/BMEI.2011.6098755

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Thin bilayer resists approach for 193nm and future photolithography

Michael Hyatt, Yoshi Hishiro
2006 | 10.1117/12.659630

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Finite Element Analysis of Alternating Phase-Shift Masks Subjected to Dynamic Pressure Loading Due to Megasonic Cleaning

Kyriakos Komvopoulos, X Yin
2008 | 10.1109/EPTC.2008.4763473

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Dependence of pattern dimensions on proximity functions in electron beam lithography

Mihir Parikh
Journal of Applied Physics | 1980 | 10.1063/1.327328

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Single-walled carbon nanotube-based field-effect transistors (non-reviewed)

H R Sharma, Zhen Xiao
2008 | 10.1109/SECON.2008.4494263

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Effects of bar length on switching field of nanoscale nickel and cobalt bars fabricated using lithography

Linshu Kong, Stephen Y Chou
Journal of Applied Physics | 1996 | 10.1063/1.363504

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Fabrication of comb-shaped microactuator for multi-degrees-of-freedom system

Futoshi Fujikawa, Hirozumi Ishibashi, Kouhei Ohnishi
European Journal of Protistology | 1992 | 10.1109/IECON.1992.254477

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