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Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides
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Paper Details
DOI
10.1016/j.optmat.2003.12.004
Journal
Optical Materials
Location
2004
Publication Type
Tags
absorption spectra
,
infrared spectra
,
single mode
,
waveguide
,
sin x
,
attenuated total reflection
,
infrared spectroscopy
,
optical waveguides
,
vibrational modes
,
hydrogen bond
,
dielectric materials
,
hydrogen bonds
,
insertion loss
,
nitride
,
pecvd
,
optical waveguide
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